0.5um 1P2MCMOS process platform。0.5um gate length，Single poly, double metal，application for LED Driver，Core/IO voltage：3.3V～5.0V, （12V, 40V optional）。FMIC has the elaborate design rule document，and the SPICE modeling.

 

Process features

Ø     Core/IO voltage：3.3V～5.0V, （12V, 40V optional）. Single poly, double metal, twin well.

Ø     Substrate silicon material is p-type <100>, 15-25ohm-cm.

Ø     10 masks and 13 photo layers.

Ø     N-Type mask Rom code for option.

Ø     Standard LOCOS process for isolation.

Ø     125A gate oxide, polycide for gate electrode.

Ø     NLDD, PLDD and spacer structure.

Ø     Ti/TiN/AlSiCu/TiN stack layer for interconnection.

Ø     Oxide and nitride stack layer for passivation.

Ø     IMD SOG planarization process.

Ø     Tungsten plug process.

 

 

Applications

Ø      DC-AC Converter

Ø      LDO Driver

Ø      Power management product